Scanning electron microscope with energy dispersive spectrometer (SEM/EDS) - JEOL JSM 6490LV

7. April, 2025

Scanning electron microscope with energy dispersive spectrometer (SEM/EDS) - JEOL JSM 6490LV

Description of equipment

The whole system consists of:

  • SEM (JEOL JSM 6490LV): vacuum sample chamber, electron source tower (W cathode), electromagnetic lenses and deflection coils and signal detectors (SE, BSE),
  • EDS (INCA PentaFETx3 detector and INCA Energy 350 microanalysis system),
  • Baltec SCD 050 sample preparation system.

The Baltec SCD 050 gold sputter and carbon sputter system is designed for sample preparation prior to analysis.

Technical data:

  • resolution: high vacuum: 3,0 nm (30 kV), 8,0 nm (3 kV), 15 nm (1 kV); low vacuum: 4,0 nm (30 kV),
  • magnification: ×5 – ×300,000,
  • accelerating voltage: 0.3 kV – 30 kV,
  • Sample stage travel: X: 125 mm, Y: 100 mm, Z: 5 mm – 80 mm, tilt: −10° – +90°, rotation: 360°,
  • pressure in low-vacuum mode: 1–270 Pa,
  • EDS detector: Si(Li), 30 mm2 detector area, resolution 133 eV at MnKa, ultra-thin polymer window (ATW2) detector.

Access to equipment of equipment

SEM/EDS is used in various fields of geology, but also for other applications:

  • palaeontological investigations,
  • sediment-petrological investigations,
  • Coal investigations,
  • mineralogical testing of materials,
  • geochemical studies of environmental media,
  • other applications: analysis of synthetic fibres, archaeological artefacts.

Equipment rental

Recording and measurements on the SEM/EDS are also carried out by qualified GeoZS operators, by prior agreement with the Administrator, for external clients and in cooperation with the service users.