Scanning electron microscope with energy dispersive spectrometer (SEM/EDS) - JEOL JSM 6490LV
Description of equipment
The whole system consists of:
- SEM (JEOL JSM 6490LV): vacuum sample chamber, electron source tower (W cathode), electromagnetic lenses and deflection coils and signal detectors (SE, BSE),
- EDS (INCA PentaFETx3 detector and INCA Energy 350 microanalysis system),
- Baltec SCD 050 sample preparation system.
The Baltec SCD 050 gold sputter and carbon sputter system is designed for sample preparation prior to analysis.
Technical data:
- resolution: high vacuum: 3,0 nm (30 kV), 8,0 nm (3 kV), 15 nm (1 kV); low vacuum: 4,0 nm (30 kV),
- magnification: ×5 - ×300.000,
- Accelerating voltage: 0,3 kV - 30 kV,
- displacement of the sample table: X: 125 mm, Y: 100 mm, Z: 5 mm - 80 mm, tilt: -10° - +90°, rotation: 360°,
- pressure in low vacuum mode: 1 - 270 Pa,
- EDS detector: Si(Li), 30 mm2 detector area, resolution 133 eV at MnKa, ultra-thin polymer window (ATW2) detector.
Access to equipment of equipment
SEM/EDS is used in various fields of geology, but also for other applications:
- palaeontological investigations,
- sediment-petrological investigations,
- Coal investigations,
- mineralogical testing of materials,
- geochemical studies of environmental media,
- other applications: analysis of synthetic fibres, archaeological artefacts.
Equipment rental
Recording and measurements on the SEM/EDS are also carried out by qualified GeoZS operators, by prior agreement with the Administrator, for external clients and in cooperation with the service users.
